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AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance

Lookup NU author(s): Dr Jinju Chen, Pengfei Duan

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This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License (CC BY-NC 4.0).

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Author(s): Wang WB, Fu YQ, Chen JJ, Xuan WP, Chen JK, Wang XZ, Mayrhofer P, Duan PF, Bittner A, Schmid U, Luo JK

Publication type: Article

Publication status: Published

Journal: Journal of Micromechanics and Microengineering

Year: 2016

Volume: 26

Online publication date: 08/06/2016

Acceptance date: 26/04/2016

Date deposited: 30/05/2016

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: Institute of Physics Publishing Ltd.

URL: http://dx.doi.org/10.1088/0960-1317/26/7/075006

DOI: 10.1088/0960-1317/26/7/075006

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