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Diffusion of ion-implanted Boron in Germanium

Lookup NU author(s): Dr Suresh Uppal, Professor Nick Cowern

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Author(s): Cowern NEB; Uppal S; Willoughby AFW; Bonar JM; Evans AGR; Morris R; Dowsett MG

Publication type: Article

Publication status: Published

Journal: Journal of Applied Physics

Year: 2001

Volume: 90

Issue: 8

Pages: 4293-4295

ISSN (print): 0021-8979

ISSN (electronic): 1089-7550

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.1402664

DOI: 10.1063/1.1402664

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