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Hardness and deformation mechanisms of highly elastic carbon nitride thin films as studied by nanoindentation

Lookup NU author(s): Emeritus Professor Trevor Page

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Abstract

Carbon nitride (CNx) thin films (0.18

Publication metadata

Author(s): Hainsworth SV, Sjostrom H, Page TF, Sundgren J-E

Publication type: Article

Publication status: Published

Journal: Materials Research Society Symposium Proceedings

Year: 1996

Volume: 436

Pages: -

ISSN (print): 0272-9172

ISSN (electronic): 1946-4274

Publisher: Materials Research Society

URL: http://www.mrs.org/s_mrs/sec_subscribe.asp?CID=12239&DID=262661&action=detail

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