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Browsing publications by
Pedro Ortiz Bahamon
Newcastle Authors
Title
Year
Dr Sunilkumar Rana
Ivano Gregoratto
Pedro Ortiz Bahamon
Dr Alun Harris
Professor James Burdess
et al.
Accurate Surface-to-Bulk Feature Alignment and Feature Size Preservation During Double-Sided Wafer Processing Using C4F8 Plasma Polymer for the Fabrication of Electrostatically Actuated Cantilever Devices
2010