Determination of mechanical parameters for rotating MEMS structures as a function of deposition method

  1. Lookup NU author(s)
  2. Sorin Soare
  3. Professor Steve Bull
  4. Dr Adrian Oila
  5. Professor Anthony O'Neill
  6. Professor Nick Wright
  7. Dr Alton Horsfall
  8. Roberto dos Santos Araujo
Author(s)Soare S, Bull SJ, Oila A, O'Neill A, Wright N, Horsfall A, dos Santos J
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameMRS Fall Meeting 2003
Conference LocationBoston, Massachusetts, USA
Year of Conference2004
Date30 November - 5 December 2003
Volume
Pages
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