Review of Stress Effects on Dopant Solubility in Silicon and Silicon-Germanium Layers

  1. Lookup NU author(s)
  2. Dr Nick Bennett
  3. Dr Chihak Ahn
  4. Professor Nick Cowern
Author(s)Bennett NS, Ahn C, Cowern NEB, Pichler P
Publication type Article
JournalSolid State Phenomena
Year2010
Volume156-158
Issue
Pages173-180
ISSN (print)1012-0394
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PublisherScitec Publications Ltd
URLhttp://dx.doi.org/10.4028/www.scientific.net/SSP.156-158.173
DOI10.4028/www.scientific.net/SSP.156-158.173
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