An electrostatically actuated cantilever device capable of accurately calibrating the cantilever on-chip for AFM-like applications

  1. Lookup NU author(s)
  2. Dr Sunilkumar Rana
  3. Dr Pedro Ortiz
  4. Dr Alun Harris
  5. Professor James Burdess
  6. Professor Calum McNeil
Author(s)Rana SD, Ortiz PM, Harris AJ, Burdess JS, McNeil CJ
Publication type Article
JournalJournal of Micromechanics and Microengineering
Year2009
Volume19
Issue4
Pages
ISSN (print)0960-1317
ISSN (electronic)1361-6439
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PublisherInstitute of Physics Publishing Ltd.
URLhttp://dx.doi.org/10.1088/0960-1317/19/4/045012
DOI10.1088/0960-1317/19/4/045012
NotesArticle no. 045012 11 pp.
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