Experimental investigation of parametric and externally forced motion in resonant MEMS sensors

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  2. Dr Barry Gallacher
  3. Professor James Burdess
  4. Jeffrey Neasham
Author(s)Harish KM, Gallacher BJ, Burdess JS, Neasham JA
Publication type Article
JournalJournal of Micromechanics and Microengineering
Year2009
Volume19
Issue1
Pages
ISSN (print)0960-1317
ISSN (electronic)1361-6439
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PublisherInstitute of Physics Publishing Ltd.
URLhttp://dx.doi.org/10.1088/0960-1317/19/1/015021
DOI10.1088/0960-1317/19/1/015021
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