Experimental investigation of parametric and externally forced motion in resonant MEMS sensors

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  2. Dr Barry Gallacher
  3. Professor James Burdess
  4. Jeffrey Neasham
Author(s)Harish KM, Gallacher BJ, Burdess JS, Neasham JA
Publication type Article
JournalJournal of Micromechanics and Microengineering
Year2009
Volume19
Issue1
Pages-
ISSN (print)0960-1317
ISSN (electronic)1361-6439
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PublisherInstitute of Physics Publishing Ltd.
URLhttp://dx.doi.org/10.1088/0960-1317/19/1/015021
DOI10.1088/0960-1317/19/1/015021
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