Dynamic characterization of MEMS using Raman spectroscopy

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  2. Dr Zhongxu Hu
  3. Dr John Hedley
  4. Dr Barry Gallacher
  5. Dr Isabel Arce-Garcia
Author(s)Hu ZX, Hedley J, Gallacher BJ, Arce-Garcia I
Publication type Article
JournalJournal of Micromechanics and Microengineering
Year2008
Volume18
Issue9
Pages
ISSN (print)0960-1317
ISSN (electronic)1361-6439
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PublisherInstitute of Physics Publishing Ltd.
URLhttp://dx.doi.org/10.1088/0960-1317/18/9/095019
DOI10.1088/0960-1317/18/9/095019
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