Investigation of oxidation-induced strain in a top-down Si nanowire platform

  1. Lookup NU author(s)
  2. Dr Piotr Dobrosz
  3. Dr Sarah Olsen
Author(s)Najmzadeh M, Bouvet D, Dobrosz P, Olsen S, Ionescu AM
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameMicroelectronic Engineering: INFOS
Conference LocationClare College, Cambridge, UK
Year of Conference2009
Date29 June-1 July 2009
Volume86, issues 7-9
Pages1961-1964
ISBN
Full text for this publication is not currently held within this repository. Alternative links are provided below where available.
PublisherElsevier
URLhttp://dx.doi.org/10.1016/j.mee.2009.03.086
DOI10.1016/j.mee.2009.03.086
Actions    Link to this publication
Share
Library holdingsSearch Newcastle University Library for this item