Review of electrical characterisation of ultra-shallow junctions with micro four-point probes

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  2. Dr Nick Bennett
  3. Professor Nick Cowern
Author(s)Petersen DH, Hansen O, Hansen TM, Boggild P, Lin R, Kjaer D, Nielsen PF, Clarysse T, Vandervorst W, Rosseel E, Bennett NS, Cowern NEB
Publication type Review
JournalJournal of Vacuum Science & Technology B
Year2010
Volume28
Issue1
PagesC1C27-C1C33
ISSN (print)1071-1023
ISSN (electronic)1520-8567
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Electrical characterization of ultra-shallow junctions, relying on advanced implant and anneal processes, has received much attention in the past few years since conventional characterization methods fail. With continued scaling of semiconductor devices, the problems associated with conventional techniques will become even more evident. In several recent studies micro four-point probe (M4PP) has been demonstrated as a reliable high precision metrology method for both sheet resistance and Hall effect measurements of ultra-shallow implants and has revealed a promising potential for carrier profiling.
URLhttp://dx.doi.org/10.1116/1.3224898
DOI10.1116/1.3224898
NotesPart B. Microelectronics and Nanometer Structures
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