In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Iow-k damascene interconnects using synchrotron radiation

  1. Lookup NU author(s)
  2. Dr Alton Horsfall
  3. Professor Anthony O'Neill
Author(s)Wilson CJ, Volders H, Croes K, Pantouvaki M, Beyer GP, Horsfall AB, O'Neill AG, Tokei Z
Publication type Conference Proceedings (inc. Abstract)
Conference NameMicroelectronic Engineering: 18th European Workshop on Materials for Advanced Metallization
Conference LocationGrenoble, France
Year of Conference2010
Legacy Date8-11 March 2009
Volume87, 3
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PublisherElsevier BV
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