In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Iow-k damascene interconnects using synchrotron radiation
- Lookup NU author(s)
- Dr Alton Horsfall
- Professor Anthony O'Neill
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| Author(s) | | Wilson CJ, Volders H, Croes K, Pantouvaki M, Beyer GP, Horsfall AB, O'Neill AG, Tokei Z |
| Editor(s) | | |
| Publication type | | Conference Proceedings (inc. Abstract) |
| Conference Name | | Microelectronic Engineering: 18th European Workshop on Materials for Advanced Metallization |
| Conference Location | | Grenoble, France |
| Year of Conference | | 2010 |
| Date | | 8-11 March 2009 |
| Volume | | 87, 3 |
| Pages | | 398-401 |
| ISBN | | 18735568 |
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| Full text for this publication is not currently held within this repository. Alternative links are provided below where available. |
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| Publisher | | Elsevier BV |
| URL | | http://dx.doi.org/10.1016/j.mee.2009.06.023 |
| DOI | | 10.1016/j.mee.2009.06.023 |
| Actions | |  |
| Library holdings | | Search Newcastle University Library for this item |
