Tip enhanced Raman spectroscopy for high resolution assessment of strained silicon devices

  1. Lookup NU author(s)
  2. Lisa Sanderson
  3. Dr Piotr Dobrosz
  4. Dr Sarah Olsen
  5. Professor Steve Bull
Author(s)Sanderson L, Dobrosz P, Olsen SH, Bull SJ, Mantl S, Buca D
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference Name36th International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2009)
Conference LocationSan Diego, California
Year of Conference2009
Legacy Date27 April-1 May 2009
Volume
Pages
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