Packaging of a silicon-based biochip

  1. Lookup NU author(s)
  2. Dr Pedro Ortiz
  3. Dr Neil Keegan
  4. Julia Spoors
  5. Catriona Charlton
Author(s)Velten T, Biehl M, Haberer W, Koch T, Ortiz P, Keegan N, Spoors J, Hedley J, McNeil C
Editor(s)Richard C. Kullberg; Rajeshuni Ramesham
Publication type Conference Proceedings (inc. Abstract)
Conference NameReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
Conference LocationSan Jose, California
Year of Conference2009
Source Publication Date28-29 January 2009
PagesArticle No. 720603
Series TitleProceedings of SPIE - The International Society for Optical Engineering
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PublisherSPIE - The International Society for Optical Engineering
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