The principle of a MEMS circular diaphragm mass sensor

  1. Lookup NU author(s)
  2. Abd Ismail
  3. Professor James Burdess
  4. Dr Alun Harris
  5. Professor Calum McNeil
  6. Dr John Hedley
  7. Dr Seung Chang
  8. Dr Guillaume Suarez
Author(s)Ismail A, Burdess J, Harris A, McNeil C, Hedley J, Chang S, Suarez G
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameInstitution of Engineering and Technology Seminar on MEMS Sensors and Actuators (ICEPT)
Conference LocationLondon, UK
Year of Conference2006
Date27-28 April 2006
Volume2006
Pages69-74
Series TitleIET Seminar Digest
ISBN0863416276
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PublisherInstitution of Engineering and Technology
URLhttp://dx.doi.org/10.1049/ic:20060447
DOI10.1049/ic:20060447
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