The principle of a MEMS circular diaphragm mass sensor

  1. Lookup NU author(s)
  2. Abd Ismail
  3. Professor James Burdess
  4. Dr Alun Harris
  5. Professor Calum McNeil
  6. Dr John Hedley
  7. Dr Seung Chang
  8. Dr Guillaume Suarez
Author(s)Ismail A, Burdess J, Harris A, McNeil C, Hedley J, Chang S, Suarez G
Publication type Conference Proceedings (inc. Abstract)
Conference NameInstitution of Engineering and Technology Seminar on MEMS Sensors and Actuators (ICEPT)
Conference LocationLondon, UK
Year of Conference2006
Date27-28 April 2006
Series TitleIET Seminar Digest
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PublisherInstitution of Engineering and Technology
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