Electrical properties of thermally grown HfO2 and HfO 2/TiO2/HfO2 MIM capacitors fabricated on SiO2/Si substrate and HfO2 MIM capacitors fabricated on sapphire

  1. Lookup NU author(s)
  2. Bing Miao
  3. Dr Rajat Mahapatra
  4. Dr Alton Horsfall
Author(s)Miao B, Mahapatra R, Wright N, Horsfal A
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameMaterials Research Society Symposium Proceedings: MRS Spring Meeting
Conference LocationSan Francisco, California, USA
Year of Conference2008
Date24-28 March 2008
Volume1073
Pages43-48
02729172
ISBN9781605608532
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PublisherMaterials Research Society
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