Electrical properties of thermally grown HfO2 and HfO 2/TiO2/HfO2 MIM capacitors fabricated on SiO2/Si substrate and HfO2 MIM capacitors fabricated on sapphire
- Lookup NU author(s)
- Bing Miao
- Dr Rajat Mahapatra
- Dr Alton Horsfall
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| Author(s) | | Miao B, Mahapatra R, Wright N, Horsfal A |
| Editor(s) | | |
| Publication type | | Conference Proceedings (inc. Abstract) |
| Conference Name | | Materials Research Society Symposium Proceedings: MRS Spring Meeting |
| Conference Location | | San Francisco, California, USA |
| Year of Conference | | 2008 |
| Date | | 24-28 March 2008 |
| Volume | | 1073 |
| Pages | | 43-48 |
| | 02729172 |
| ISBN | | 9781605608532 |
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| Full text for this publication is not currently held within this repository. Alternative links are provided below where available. |
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| Publisher | | Materials Research Society |
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| Library holdings | | Search Newcastle University Library for this item |
