Packaging of a silicon-based biochip

  1. Lookup NU author(s)
  2. Dr Pedro Ortiz
  3. Dr Neil Keegan
  4. Julia Spoors
  5. Dr John Hedley
  6. Professor Calum McNeil
Author(s)Velten T, Biehl M, Haberer W, Koch T, Ortiz P, Keegan N, Spoors J, Hedley J, McNeil C
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
Conference LocationSan Jose, California, USA
Year of Conference2009
Date28 January 2009
Volume7206
Pages720603
0277786X
ISBN9780819474520
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PublisherSPIE
URLhttp://dx.doi.org/10.1117/12.813500
DOI10.1117/12.813500
Actions    Link to this publication
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