In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/low-k damascene interconnects using synchrotron radiation
- Lookup NU author(s)
- Dr Alton Horsfall
- Professor Anthony O'Neill
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| Author(s) | | Wilson C, Volders H, Croes K, Pantouvaki M, Beyer G, Horsfall A, O'Neill A, Tokei Z |
| Publication type | | Article |
| Journal | | Microelectronic Engineering |
| Year | | 2010 |
| Volume | | 87 |
| Issue | | 3 |
| Pages | | 398-401 |
| ISSN (print) | | 0167-9317 |
| ISSN (electronic) | | 1873-5568 |
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| Full text for this publication is not currently held within this repository. Alternative links are provided below where available. |
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| Publisher | | Elsevier BV |
| URL | | http://dx.doi.org/10.1016/j.mee.2009.06.023 |
| DOI | | 10.1016/j.mee.2009.06.023 |
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