Analysis and characterization of a mechanical sensor to monitor stress in interconnect features

  1. Lookup NU author(s)
  2. Dr Barry Gallacher
  3. Professor Steve Bull
  4. Dr Alton Horsfall
  5. Professor Anthony O'Neill
Author(s)Wilson CJ, Croes K, Tokei Z, Beyer GP, Gallacher BJ, Bull SJ, Horsfall AB, O'Neill AG
Publication type Article
JournalThin Solid Films
Year2010
Volume519
Issue1
Pages443-449
ISSN (print)0040-6090
ISSN (electronic)
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PublisherElsevier SA
URLhttp://dx.doi.org/10.1016/j.tsf.2010.07.082
DOI10.1016/j.tsf.2010.07.082
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