Mechanical response of atomic layer deposition alumina coatings on stiff and compliant substrates

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Author(s)Bull SJ
Publication type Article
JournalJournal of Vacuum Science & Technology A
Year2012
Volume30
Issue1
Pages
ISSN (print)1553-1813
ISSN (electronic)1944-2807
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PublisherAmerican Institute of Physics
URLhttp://dx.doi.org/10.1116/1.3670401
DOI10.1116/1.3670401
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