Hinge sensitivity in a micro-rotating structure for predicting induced thermo mechanical stress in integrated circuit metal interconnects

  1. Lookup NU author(s)
  2. Sorin Soare
  3. Professor Steve Bull
  4. Dr Alton Horsfall
  5. Professor Nick Wright
Author(s)Soare SM; Wright NG; Bull SJ; Horsfall AB; dos Santos JMM; Wang K
Editor(s)Corcoran, S.G., Joo, Y.C., Moody, N.R., Suo, Z.
Publication type Conference Proceedings (inc. Abstract)
Conference NameThin Films: Stresses and Mechanical Properties X
Conference LocationBoston, Massachusetts, USA
Year of Conference2004
Date1-5 December 2003
Volume795
Pages467-472
Series TitleMRS Proceedings
0272-9172
ISBN9781558997332
Full text for this publication is not currently held within this repository. Alternative links are provided below where available.
PublisherMaterials Research Society
Actions    Link to this publication
Share
Library holdingsSearch Newcastle University Library for this item