Hinge sensitivity in a micro-rotating structure for predicting induced thermo mechanical stress in integrated circuit metal interconnects
- Lookup NU author(s)
- Sorin Soare
- Professor Steve Bull
- Dr Alton Horsfall
- Professor Nick Wright
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| Author(s) | | Soare SM; Wright NG; Bull SJ; Horsfall AB; dos Santos JMM; Wang K |
| Editor(s) | | Corcoran, S.G., Joo, Y.C., Moody, N.R., Suo, Z. |
| Publication type | | Conference Proceedings (inc. Abstract) |
| Conference Name | | Thin Films: Stresses and Mechanical Properties X |
| Conference Location | | Boston, Massachusetts, USA |
| Year of Conference | | 2004 |
| Date | | 1-5 December 2003 |
| Volume | | 795 |
| Pages | | 467-472 |
| Series Title | | MRS Proceedings |
| | 0272-9172 |
| ISBN | | 9781558997332 |
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| Full text for this publication is not currently held within this repository. Alternative links are provided below where available. |
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| Publisher | | Materials Research Society |
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| Library holdings | | Search Newcastle University Library for this item |
