Hinge sensitivity in a micro-rotating structure for predicting induced thermo mechanical stress in integrated circuit metal interconnects

  1. Lookup NU author(s)
  2. Sorin Soare
  3. Professor Steve Bull
  4. Dr Alton Horsfall
  5. Professor Nick Wright
Author(s)Soare SM; Wright NG; Bull SJ; Horsfall AB; dos Santos JMM; Wang K
Editor(s)Corcoran, S.G., Joo, Y.C., Moody, N.R., Suo, Z.
Publication type Conference Proceedings (inc. Abstract)
Conference NameThin Films: Stresses and Mechanical Properties X
Conference LocationBoston, Massachusetts, USA
Year of Conference2004
Source Publication Date1-5 December 2003
Series TitleMRS Proceedings
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PublisherMaterials Research Society
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