Experimental observations of surface roughness in uniaxially loaded strained Si microelectromechanical systems-based structures

  1. Lookup NU author(s)
  2. Dr Enrique Escobedo-Cousin
  3. Dr Sarah Olsen
  4. Professor Jean-Pierre Raskin
Author(s)Escobedo-Cousin E, Olsen SH, Pardoen T, Bhaskar U, Raskin JP
Publication type Article
JournalApplied Physics Letters
Year2011
Volume99
Issue24
Pages
ISSN (print)0003-6951
ISSN (electronic)1077-3118
Full text for this publication is not currently held within this repository. Alternative links are provided below where available.
PublisherAmerican Institute of Physics
URLhttp://dx.doi.org/10.1063/1.3669413
DOI10.1063/1.3669413
Actions    Link to this publication