On-chip tensile testing of nanoscale silicon free-standing beams

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  2. Dr Enrique Escobedo-Cousin
  3. Dr Sarah Olsen
  4. Professor Jean-Pierre Raskin
Author(s)Bhaskar U, Passi V, Houri S, Escobedo-Cousin E, Olsen SH, Pardoen T, Raskin JP
Publication type Article
JournalJournal of Materials Research
Year2012
Volume27
Issue3
Pages571-579
ISSN (print)0884-2914
ISSN (electronic)2044-5326
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PublisherCambridge University Press
URLhttp://dx.doi.org/10.1557/jmr.2011.340
DOI10.1557/jmr.2011.340
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