Effect of deposition temperature on the properties of CeO2 films grown by atomic layer deposition

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  2. Dr Peter King
Author(s)King PJ, Werner M, Chalker PR, Jones AC, Aspinall HC, Basca J, Wrench JS, Black K, Davies HO, Heys PN
Publication type Article
JournalThin Solid Films
Year2011
Volume519
Issue13
Pages4192-4195
ISSN (print)0040-6090
ISSN (electronic)1879-2731
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PublisherElsevier S.A.
URLhttp://dx.doi.org/10.1016/j.tsf.2011.02.025
DOI10.1016/j.tsf.2011.02.025
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