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Efficient Parametric Optimisation of Support Loss in MEMS beam resonators via an enhanced Rayleigh-Ritz method
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Dr Barry Gallacher
Grigg HTD, Gallacher BJ
Journal of Physics: Conference Series
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MEMS resonators offer attractive prospects in several application areas, including high-performance, low cost sensors, among several others. The performance of many resonant MEMS depends critically on the Q factor, and an important, poorly quantified contribution to the overall Q is the support loss. Additionally, the parameter space for the geometry can be of moderately high dimension, making FEA based parametric optimisation computationally inefficient. Thus motivated, a numerical method based on the Rayleigh-Ritz substructure synthesis using quasicomparison functions is developed, applicable to a wide and important class of beam resonators. It is shown to be highly efficient by comparison with classical FEA methods, facilitating a detailed examination of the support Q as a function of position in parameter space. Selected results are presented and briefly discussed, with particular attention given to convergence, computational efficiency and design optimisation. General design principles for multiply-supported framelike beam resonators are considered in the light of the results, and extensions to the modelling are briefly covered.
Modern Practice in Stress and Vibration Analysis 2012 (MPSVA 2012). 28-31 August 2012, University of Glasgow, UK.
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