Efficient Parametric Optimisation of Support Loss in MEMS beam resonators via an enhanced Rayleigh-Ritz method

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  2. Harry Grigg
  3. Dr Barry Gallacher
Author(s)Grigg HTD, Gallacher BJ
Publication type Article
JournalJournal of Physics: Conference Series
Year2012
Volume382
Issue1
Pages
ISSN (print)1742-6588
ISSN (electronic)1742-6596
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MEMS resonators offer attractive prospects in several application areas, including high-performance, low cost sensors, among several others. The performance of many resonant MEMS depends critically on the Q factor, and an important, poorly quantified contribution to the overall Q is the support loss. Additionally, the parameter space for the geometry can be of moderately high dimension, making FEA based parametric optimisation computationally inefficient. Thus motivated, a numerical method based on the Rayleigh-Ritz substructure synthesis using quasicomparison functions is developed, applicable to a wide and important class of beam resonators. It is shown to be highly efficient by comparison with classical FEA methods, facilitating a detailed examination of the support Q as a function of position in parameter space. Selected results are presented and briefly discussed, with particular attention given to convergence, computational efficiency and design optimisation. General design principles for multiply-supported framelike beam resonators are considered in the light of the results, and extensions to the modelling are briefly covered.
PublisherIOP Science
URLhttp://dx.doi.org/10.1088/1742-6596/382/1/012028
DOI10.1088/1742-6596/382/1/012028
NotesModern Practice in Stress and Vibration Analysis 2012 (MPSVA 2012). 28-31 August 2012, University of Glasgow, UK.
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