Top-down fabrication of single crystal silicon nanowire using optical lithography

  1. Lookup NU author(s)
  2. Nor Za'bah
  3. Dr Kelvin Kwa
  4. Professor Anthony O'Neill
Author(s)Za'bah NF, Kwa KSK, Bowen L, Mendis B, O'Neill A
Publication type Article
JournalJournal of Applied Physics
Year2012
Volume112
Issue2
Pages
ISSN (print)0021-8979
ISSN (electronic)1089-7550
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PublisherAmerican Institute of Physics
URLhttp://dx.doi.org/10.1063/1.4737463
DOI10.1063/1.4737463
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