Top-down fabrication of single crystal silicon nanowire using optical lithography

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  2. Nor Za'bah
  3. Dr Kelvin Kwa
  4. Professor Anthony O'Neill
Author(s)Za'bah NF, Kwa KSK, Bowen L, Mendis B, O'Neill A
Publication type Article
JournalJournal of Applied Physics
Year2012
Volume112
Issue2
Pages
ISSN (print)0021-8979
ISSN (electronic)1089-7550
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PublisherAmerican Institute of Physics
URLhttp://dx.doi.org/10.1063/1.4737463
DOI10.1063/1.4737463
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