Evaluation of strained Si/SiGe material for high performance CMOS

  1. Lookup NU author(s)
  2. Dr Sarah Olsen
  3. Professor Anthony O'Neill
  4. Dr Sanatan Chattopadhyay
  5. Dr Kelvin Kwa
  6. Luke Driscoll
  7. Dr David Robbins
  8. Dr Jun Zhang
Author(s)Olsen SH, O'Neill AG, Chattopadhyay S, Kwa KSK, Driscoll LS, Norris DJ, Cullis AG, Robbins DJ, Zhang J
Publication type Article
JournalJournal of Applied Physics
Year2004
Volume95
Issue10
Pages5931-5933
ISSN (print)0021-8979
ISSN (electronic)1089-7550
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PublisherAmerican Institute of Physics
URLhttp://dx.doi.org/10.1063/1.1691177
DOI10.1063/1.1691177
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