Laser Annealing of Low Temperature Deposited Silicon Waveguides

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Author(s): Franz Y, Runge AF, Oo S, Healy N, Martinez-Jimenez G, Khokhar AZ, Tarazona A, Chong HM, Mailis S, Peacock AC

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: CLEO: Science and Innovations 2017

Year of Conference: 2017

Print publication date: 17/05/2017

Online publication date: 18/05/2017

Acceptance date: 01/03/2017

Date deposited: 01/06/2017

Publisher: OSA Publishing

URL: https://doi.org/10.1364/CLEO_SI.2017.SM3K.4

DOI: 10.1364/CLEO_SI.2017.SM3K.4

Series Title: Conference on Lasers and Electro-Optics

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