Enhanced nitrogen diffusion in 4H-SiC

  1. Lookup NU author(s)
  2. Dr Gordon Phelps
  3. Professor Nick Wright
  4. Dr Christopher Johnson
  5. Professor Anthony O'Neill
  6. Dr Sylvie Ortolland
Author(s)Phelps GJ, Wright NG, Johnson CM, O'Neill AG, Ortolland SA
Publication type Article
JournalApplied Physics Letters
Year2002
Volume80
Issue2
Pages228-230
ISSN (print)0003-6951
ISSN (electronic)1077-3118
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PublisherAmerican Institute of Physics
URLhttp://dx.doi.org/10.1063/1.1432451
DOI10.1063/1.1432451
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