Mechanical Properties of Polycrystalline 3C-SiC Films between Room Temperature and 600C

  1. Lookup NU author(s)
  2. Dr Michele Pozzi
  3. Emeritus Professor James Burdess
  4. Dr Alun Harris
  5. Dr Gordon Phelps
  6. Professor Nick Wright
Author(s)Pozzi M, Burdess JS, Harris AJ, Phelps GJ, Wright NG, Lee KK, Cheung R, Zorman CA, Mehregeny M
Editor(s)Liu, A; Wu, J; Lu, C; Reddy, CD
Publication type Conference Proceedings (inc. Abstract)
Conference NameMEMS Technology and Devices: Proceedings of the ICMAT 2007 Conference
Conference LocationSingapore
Year of Conference2007
Source Publication Date1-6 July 2007
Full text for this publication is not currently held within this repository. Alternative links are provided below where available.
ActionsLink to this publication
Library holdingsSearch Newcastle University Library for this item