Mechanical Properties of Polycrystalline 3C-SiC Films between Room Temperature and 600C

  1. Lookup NU author(s)
  2. Dr Michele Pozzi
  3. Professor James Burdess
  4. Dr Alun Harris
  5. Dr Gordon Phelps
  6. Professor Nick Wright
Author(s)Pozzi M, Burdess JS, Harris AJ, Phelps GJ, Wright NG, Lee KK, Cheung R, Zorman CA, Mehregeny M
Editor(s)Liu, A; Wu, J; Lu, C; Reddy, CD
Publication type Conference Proceedings (inc. Abstract)
Conference NameMEMS Technology and Devices: Proceedings of the ICMAT 2007 Conference
Conference LocationSingapore
Year of Conference2007
Legacy Date1-6 July 2007
Volume
Pages230-233
ISBN9789812709608
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PublisherPSP
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