The contact response of thin Si-C-coated silicon systems-characterisation by nanoindentation

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Author(s)Berasategui EG, Page TF
Publication type Article
JournalSurface and Coatings Technology
Year2003
Volume163-164
Issue
Pages491-498
ISSN (print)0257-8972
ISSN (electronic)
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PublisherElsevier SA
URLhttp://dx.doi.org/10.1016/S0257-8972(02)00647-3
DOI10.1016/S0257-8972(02)00647-3
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