Evaluation of strained Si/SiGe material for high performance CMOS

  1. Lookup NU author(s)
  2. Dr Sarah Olsen
  3. Professor Anthony O'Neill
  4. Dr Sanatan Chattopadhyay
  5. Dr Kelvin Kwa
  6. Luke Driscoll
  7. Dr David Robbins
Author(s)Olsen SH, O'Neill AG, Chattopadhyay S, Kwa KSK, Driscoll LS, Norris DJ, Cullis AG, Robbins DJ, Zhang J
Publication type Article
JournalSemiconductor Science and Technology
Year2004
Volume19
Issue6
Pages707-714
ISSN (print)0268-1242
ISSN (electronic)1361-6641
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PublisherInstitute of Physics Publishing Ltd.
URLhttp://dx.doi.org/10.1088/0268-1242/19/6/008
DOI10.1088/0268-1242/19/6/008
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