Calibration and optimization of interconnect based MEMS test structures for predicting thermo-mechanical stress in metallization

  1. Lookup NU author(s)
  2. Dr Alton Horsfall
  3. Professor Nick Wright
  4. Professor Anthony O'Neill
  5. Sorin Soare
  6. Professor Steve Bull
Author(s)Dos Santos JMM, Horsfall AB, Pina JCP, Wright NG, O'Neill AG, Wang K, Soare SM, Bull SJ, Terry JG, Walton AJ, Gundlach AM, Stevenson JTM
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference Name42nd Annual IEEE International Reliability Physics Symposium
Conference LocationPhoenix, Arizona, USA
Year of Conference2004
Date25-29 April 2004
Volume
Pages255-258
00999512
ISBN078038315X
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PublisherIEEE
URLhttp://dx.doi.org/10.1109/RELPHY.2004.1315333
DOI10.1109/RELPHY.2004.1315333
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