Dependence of process parameters on stress generation in aluminum thin films

  1. Lookup NU author(s)
  2. Dr Alton Horsfall
  3. Sorin Soare
  4. Professor Steve Bull
  5. Professor Nick Wright
  6. Professor Anthony O'Neill
Author(s)Horsfall AB, Wang K, Dos-Santos JMM, Soare SM, Bull SJ, Wright NG, O'Neill AG, Terry JG, Walton AJ, Gundlach AM, Stevenson JTM
Publication type Article
JournalIEEE Transactions on Device and Materials Reliability
Year2004
Volume4
Issue3
Pages482-486
ISSN (print)1530-4388
ISSN (electronic)1558-2574
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PublisherIEEE
URLhttp://dx.doi.org/10.1109/TDMR.2004.829389
DOI10.1109/TDMR.2004.829389
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