Nanometer Scale Strain Profiling Through Si-SiGe Heterolayers

  1. Lookup NU author(s)
  2. Rouzet Agaiby
  3. Dr Sarah Olsen
  4. Dr Piotr Dobrosz
  5. Professor Steve Bull
  6. Professor Anthony O'Neill
Author(s)Agaiby RMB, Olsen SH, Dobrosz P, Coulson H, Bull SJ, O'Neill AG
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference Name50th Electronic Materials Conference (EMC 2008)
Conference LocationSanta Barbara, USA
Year of Conference2008
Date25-27 June 2008
Volume
Pages
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PublisherThe Minerals, Metals & Materials Society (TMS)