Dry release fabrication and testing of SiC electrostatic cantilever actuators

  1. Lookup NU author(s)
  2. Mr MA Hussan Hassan
  3. Dr Alun Harris
  4. Professor James Burdess
Author(s)Jiang L, Hassan M, Cheung R, Harris AJ, Burdess JS, Zorman CA, Mehregany M
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameMicroelectronic Engineering: 30th International Conference on Micro- and Nano-Engineering
Conference Location
Year of Conference2005
Date19-22 September 2004
Volume78-79 (1-4)
Pages106-111
01679317
ISBN18735568
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PublisherElsevier BV
URLhttp://dx.doi.org/10.1016/j.mee.2004.12.015
DOI10.1016/j.mee.2004.12.015
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