Sensitivity of a rotating beam sensor for stress evaluation in aluminium thin films

  1. Lookup NU author(s)
  2. Dr Alton Horsfall
  3. Professor Nick Wright
  4. Sorin Soare
  5. Professor Steve Bull
  6. Professor Anthony O'Neill
Author(s)Dos Santos JMM, Pina JCP, Batista AC, Horsfall AB, Wang K, Wright NG, Soare SM, Bull SJ, O'Neill AG, Terry JG, Walton AJ, Gundlach AM, Stevenson JTM
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameMaterials Science Forum
Conference LocationXi'an, China
Year of Conference2005
Legacy Date14-17 June 2004
Volume490-491
Pages649-654
0255-5476
ISBN0878499695
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PublisherTrans Tech Publications Ltd.
URLhttp://dx.doi.org/10.4028/www.scientific.net/MSF.490-491.649
DOI10.4028/www.scientific.net/MSF.490-491.649
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