Frequency adjustment of microelectromechanical cantilevers using electrostatic pull down

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  2. Said Kafumbe
  3. Professor James Burdess
  4. Dr Alun Harris
Author(s)Kafumbe SMM, Burdess JS, Harris AJ
Publication type Article
JournalJournal of Micromechanics and Microengineering
Year2005
Volume15
Issue5
Pages1033-1039
ISSN (print)0960-1317
ISSN (electronic)1361-6439
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PublisherInstitute of Physics Publishing Ltd.
URLhttp://dx.doi.org/10.1088/0960-1317/15/5/020
DOI10.1088/0960-1317/15/5/020
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