The principle of a MEMS circular diaphragm mass sensor

  1. Lookup NU author(s)
  2. Abd Ismail
  3. Professor James Burdess
  4. Dr Alun Harris
  5. Professor Calum McNeil
  6. Dr John Hedley
  7. Dr Seung Chang
  8. Dr Guillaume Suarez
Author(s)Ismail AK, Burdess JS, Harris AJ, McNeil CJ, Hedley J, Chang SC, Suarez G
Publication type Article
JournalJournal of Micromechanics and Microengineering
Year2006
Volume16
Issue8
Pages1487-1493
ISSN (print)0960-1317
ISSN (electronic)1361-6439
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PublisherInstitute of Physics Publishing Ltd.
URLhttp://dx.doi.org/10.1088/0960-1317/16/8/008
DOI10.1088/0960-1317/16/8/008
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