Ge out-diffusion and its effect on electrical properties in s-Si/SiGe devices

  1. Lookup NU author(s)
  2. Dr Suresh Uppal
  3. Dr Mehdi Kanoun
  4. Dr Sanatan Chattopadhyay
  5. Rouzet Agaiby
  6. Dr Sarah Olsen
  7. Professor Steve Bull
  8. Professor Anthony O'Neill
Author(s)Uppal S, Kanoun M, Chattopadhyay S, Agaiby R, Olsen SH, Bull SJ, O'Neill AG
Editor(s)Pawlak, PJ
Publication type Conference Proceedings (inc. Abstract)
Conference NameDoping Engineering for Device Fabrication
Conference LocationSan Francisco, USA
Year of Conference2006
Legacy Date18-19 April 2006
Volume912
Pages65-70
Series TitleMaterials Research Society Symposium Proceedings
02729172
ISBN9781558998681
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PublisherMaterials Research Society
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