High temperature characterization of high-κ dielectrics on SiC

  1. Lookup NU author(s)
  2. Ming-Hung Weng
  3. Dr Rajat Mahapatra
  4. Peter Tappin
  5. Bing Miao
  6. Dr Sanatan Chattopadhyay
  7. Dr Alton Horsfall
  8. Professor Nick Wright
Author(s)Weng MH, Mahapatra R, Tappin P, Miao B, Chattopadhyay S, Horsfall AB, Wright NG
Publication type Article
JournalMaterials Science in Semiconductor Processing
Year2006
Volume9
Issue6
Pages1133-1136
ISSN (print)1369-8001
ISSN (electronic)1873-4081
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PublisherPergamon
URLhttp://dx.doi.org/10.1016/j.mssp.2006.10.032
DOI10.1016/j.mssp.2006.10.032
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