SiC cantilever resonators with electrothermal actuation

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  2. Dr John Hedley
  3. Mr MA Hussan Hassan
  4. Dr Alun Harris
  5. Professor James Burdess
Author(s)Jiang L, Cheung R, Hedley J, Hassan M, Harris AJ, Burdess JS, Mehregany M, Zorman CA
Publication type Article
JournalSensors and Actuators A: Physical
Year2006
Volume128
Issue2
Pages376-386
ISSN (print)0924-4247
ISSN (electronic)1873-3069
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PublisherElsevier
URLhttp://dx.doi.org/10.1016/j.sna.2006.01.045
DOI10.1016/j.sna.2006.01.045
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