Diffusion and activation of dopants in silicon and advanced silicon-based materials

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  2. Professor Nick Cowern
  3. Dr Suresh Uppal
Author(s)Pichler P, Ortiz CJ, Colombeau B, Cowern NEB, Lampin E, Uppal S, Karunaratne MSA, Bonar JM, Willoughby AFW, Claverie A, Cristiano F, Lerch W, Paul S
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Publication type Conference Proceedings (inc. Abstract)
Conference Name21sth Nordic Semiconductor Meeting
Conference LocationSundvolden, Norway
Year of Conference2006
Date18-19 August 2005
VolumeT126
Pages89-96
0281-1847
ISBN00318949
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PublisherPhysica Scripta T, Kungliga Vetenskapsakademien
URLhttp://dx.doi.org/10.1088/0031-8949/2006/T126/021
DOI10.1088/0031-8949/2006/T126/021
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