Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers

  1. Lookup NU author(s)
  2. Goutan Dalapati
  3. Dr Sanatan Chattopadhyay
  4. Dr Yuriy Butenko
  5. Dr Lidija Siller
Author(s)Bera MK, Chakraborty S, Das R, Dalapati GK, Chattopadhyay S, Samanta SK, Yoo WJ, Chakraborty AK, Butenko Y, Siller L, Hunt MRC, Saha S, Maiti CK
Publication type Article
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Year2006
Volume24
Issue1
Pages84-90
ISSN (print)0734-2101
ISSN (electronic)1071-8028
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PublisherAmerican Institute of Physics
URLhttp://dx.doi.org/10.1116/1.2137329
DOI10.1116/1.2137329
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