Ge out-diffusion and its effect on electrical properties in s-Si/SiGe devices

  1. Lookup NU author(s)
  2. Dr Suresh Uppal
  3. Dr Mehdi Kanoun
  4. Dr Sanatan Chattopadhyay
  5. Rimoon Agaiby
  6. Dr Sarah Olsen
  7. Professor Steve Bull
  8. Professor Anthony O'Neill
Author(s)Uppal S, Kanoun M, Chattopadhyay S, Agaiby R, Olsen SH, Bull SJ, O'Neill A
Publication type Conference Proceedings (inc. Abstract)
Conference NameMaterials Research Society Symposium Proceedings: MRS Spring Meeting
Conference LocationSan Francisco, California, USA
Year of Conference2006
Source Publication Date18-19 April 2006
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PublisherMaterials Research Society
ActionsLink to this publication
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