Mechanical properties of poly crystalline 3C-SiC heteroepitaxial layers

  1. Lookup NU author(s)
  2. Dr Michele Pozzi
  3. Dr Alun Harris
  4. Professor James Burdess
  5. Dr Gordon Phelps
  6. Professor Nick Wright
Author(s)Pozzi M, Harris AJ, Burdess JS, Lee KK, Cheung R, Phelps GJ, Wright NG, Zorman CA, Mehregany M
Editor(s)Matthew Laudon; Bartlomiej F Romanowicz
Publication type Conference Proceedings (inc. Abstract)
Conference Name2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings
Conference LocationSanta Clara, California, USA
Year of Conference2007
Date20-24 May 2007
Volume4
Pages65-68
ISBN1420063421
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PublisherNano Science and Technology Institute
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