Monte Carlo simulation of Boron implantation into (100) germanium

  1. Lookup NU author(s)
  2. Dr Suresh Uppal
Author(s)Wittmann R, Hossinger A, Cervenka J, Uppal S, Selberherr S
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameInternational Conference on Simulation of Semiconductor Processes and Devices, SISPAD
Conference LocationMonterey, CA
Year of Conference2007
Date6-8 September 2006
Volume
Pages381-384
ISBN9781424404049
Full text for this publication is not currently held within this repository. Alternative links are provided below where available.
PublisherIEEE
URLhttp://dx.doi.org/10.1109/SISPAD.2006.282914
DOI10.1109/SISPAD.2006.282914
Actions    Link to this publication
Library holdingsSearch Newcastle University Library for this item