Trap assisted conduction in high k dielectric capacitors on 4H-SiC

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  2. Ming-Hung Weng
  3. Dr Rajat Mahapatra
  4. Dr Alton Horsfall
  5. Professor Nick Wright
Author(s)Weng MH, Mahapatra R, Horsfall AB, Wright NG, Coleman PG, Burrows CP
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference Name6th European Conference on Silicon Carbide and Related Materials (ECSCRM 2006)
Conference LocationNewcastle upon Tyne, UK
Year of Conference2007
Date3-7 September 2006
Volume556-557
Pages679-682
0255-5476
ISBN14226375
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PublisherMaterials Science Forum: Trans Tech Publications Ltd
URLhttp://dx.doi.org/10.4028/www.scientific.net/MSF.556-557.679
DOI10.4028/www.scientific.net/MSF.556-557.679
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