ePrints

Impact of Ge diffusion and wafer cross hatching on strained Si MOSFET electrical parameters

Lookup NU author(s): Luke Driscoll, Dr Sarah Olsen, Dr Sanatan Chattopadhyay, Professor Anthony O'Neill, Dr Kelvin Kwa

Downloads

Full text for this publication is not currently held within this repository. Alternative links are provided below where available.

Publication metadata

Author(s): Driscoll LS, Olsen S, Chattopadhyay S, O'Neill AG, Kwa K

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: International Conference on Materials Research Symposium (MRS)

Year of Conference: 2004

Share