A focused-ion-beam-fabricated micro-paddle resonator for mass detection

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  2. Dr John Hedley
Author(s)Boonliang B, Prewett PD, Hedley J, Preece J, Hamlett CA
Publication type Article
JournalJournal of Micromechanics and Microengineering
Year2008
Volume18
Issue1
Pages
ISSN (print)0960-1317
ISSN (electronic)1361-6439
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PublisherInstitute of Physics Publishing Ltd.
URLhttp://dx.doi.org/10.1088/0960-1317/18/1/015021
DOI10.1088/0960-1317/18/1/015021
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